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Doctoral Thesis
DOI
10.11606/T.43.2004.tde-24022014-150716
Document
Author
Full name
Alfredo Rodrigues Vaz
Institute/School/College
Knowledge Area
Date of Defense
Published
São Paulo, 2004
Supervisor
Committee
Salvadori, Maria Cecilia Barbosa da Silveira (President)
Balzaretti, Naira Maria
Missell, Frank Patrick
Rechenberg, Hercilio Rodolfo
Verdonck, Patrick Bernard
Title in Portuguese
Medidas do módulo elástico de filmes finos metálicos
Keywords in Portuguese
Filmes finos
Materiais nanoestruturados
Modulo elástico
Abstract in Portuguese
Neste trabalho determinamos o módulo elástico de filmes finos metálicos nanoestruturados. Os metais estudados, platina, ouro e paládio foram depositados utilizando a técnica de Metal Plasma Immersion Ion Implantation and Deposition. Um novo método foi utilizado para as medidas de módulo elástico, no qual cantiléveres de microscopia de força atômica são uniformemente recobertos com os filmes finos metálicos. Medidas das frequências de ressonância dos cantiléveres foram realizadas antes e depois dos recobrimentos com os filmes. Usando a teoria de vibração de barras, determinamos os valores dos módulos elásticos desses filmes. Obtivemos valores que estão entre 7 e 12% menores do que os respectivos módulos elásticos dos metais na forma de bulk. Um modelo simples em conta o caráter nanoestruturado dos materiais. Caracterizações complementares foram realizadas como : microscopia de tunelamento, difração de raios X e RBS (Rutherfor Backscattering Spectrometry).
Title in English
Measurements Elastic Modulus Metallic Thin Films
Keywords in English
Elastic modulus
Nanostructured materials
Thin films
Abstract in English
In this work we have determined the elastic moduli of nanostructured metallic thin films. The analyzed metals, platinum, gold and palladium, have been deposited using the technique Metal Plasma Immersion Ion Implantation and Deposition. A new method was adopted to determine the elastic moduli, where cantilevers of atomic force microscopy were uniformly coated with thin films. The resonance frequencies of the cantilevers have been measured before and after the films coating. The elastic moduli were finally obtained using the vibration beam theory. The determined elastic constants are smaller than the respective bulk moduli: about 12% for Pt and Au and about 7% for Pd. A simple model is proposed to explain the softening of the elastic moduli taking into account the nanostructured character of the films. Additional characterizations have been done like: scanning tunneling microscopy, X-ray diffraction and RBS (Rutherford Backscattering Spectrometry).
 
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42552Vaz.pdf (951.76 Kbytes)
Publishing Date
2014-02-24
 
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