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Master's Dissertation
DOI
https://doi.org/10.11606/D.88.2008.tde-04042008-105854
Document
Author
Full name
Rafael Henriques Longaresi
E-mail
Institute/School/College
Knowledge Area
Date of Defense
Published
São Carlos, 2008
Supervisor
Committee
Faria, Roberto Mendonça (President)
Miranda, Paulo Barbeitas
Oliveira, Elisabeth Andreoli de
Title in Portuguese
Formação de estruturas submicrométricas auto-organizadas de copolímeros sobre substratos sólidos e aplicações em litografia
Keywords in Portuguese
Copolímeros
Elastômero
Estruturas auto-organizadas
Nanolitografia
Abstract in Portuguese
Processos de nanofabricação baseado na auto-montagem de estruturas de copolímeros em bloco tem se tornado importantes ferramentas na nanotecnologia devido a formação de estruturas altamente regulares e ordenadas. Nesse trabalho, apresentaremos resultados experimentais de estruturas sub-micrométricas do copolímero tribloco poliestireno-b-poli(etileno-co-butileno)-b-poliestireno (SEBS), com 15:70:15 de taxa de peso com Mw = 112.000 gmol-1e Mw/Mn = 1,15, que são formadas durante processos de evaporação de sua solução seguidas de dewetting. Foi observado nanoestruturas ordenadas na forma de tiras e pontos, fortemente dependentes da concentração polimérica da solução. Todo o processo engloba uma seqüência de eventos, envolvendo ondulações devido a fluxos termocapilares, dewetting e instabilidade de Rayleigh, assim como a contribuição da segregação de fase entre os componentes do copolímero. Imagens de AFM claramente mostram que a instabilidades das nanoestruturas formadas por tiras decaem em pontos. Também, o fenômeno da separação de microfase do copolímero em bloco desempenha um processo importante, estabelecendo a espessura da estrutura final. Modelos sub-micrométricos obtidos em silicone a partir das estruturas de SEBS mostram que esta é uma técnica promissora de litografia para a nanoeletrônica.
Title in English
Formation of self assembled submicrometric copolymer structures on solid substrates and lithography application
Keywords in English
Copolímeros
Elastômero
Estruturas auto-organizadas
Nanolitografia
Abstract in English
Nanofabrication processes based on self-assembling block copolymers are coming important tools in nanotechnology owing to its properties that provide high regular and ordered patterns. Here, we report experimental results, and a theoretical discussion, of self-organized submicrometric structures of a poly(styrene)-b-poly(ethene-co-butene-1)-b-poly(styrene) triblock copolymer (SEBS) - 15:70:15 weight ratio with Mw= 112,000 gmol-1 and Mw/Mn = 1.15 - which are formed during evaporation of its solution followed by dewetting process. We observed regular nanostructures with long-range order in the form of periodic ribbons and dots, which strongly depend on the critical polymer concentrations. The whole process comprised a sequence of events, involving undulations due to thermocapillary flow, dewetting and Rayleigh instability, as well as the contribution of phase segregation among the components of the copolymer. After the complete drying, two different patterns were observed: the parallel oriented ribbons and a hexagonal array of dots. AFM pictures clearly show that the instability of the ribbons decays into dots. Also, the microphase separation phenomenon of the block copolymer played an important role in this process, establishing the thickness of the final nanostructures. Submicrometric templates in silicone obtained from such structures shows that this is promising lithographic technique for nanoelectronics.
 
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DISSERTACAO.pdf (4.05 Mbytes)
Publishing Date
2008-04-09
 
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