• JoomlaWorks Simple Image Rotator
  • JoomlaWorks Simple Image Rotator
  • JoomlaWorks Simple Image Rotator
  • JoomlaWorks Simple Image Rotator
  • JoomlaWorks Simple Image Rotator
  • JoomlaWorks Simple Image Rotator
  • JoomlaWorks Simple Image Rotator
  • JoomlaWorks Simple Image Rotator
  • JoomlaWorks Simple Image Rotator
  • JoomlaWorks Simple Image Rotator
 
  Bookmark and Share
 
 
Master's Dissertation
DOI
https://doi.org/10.11606/D.85.2004.tde-06082007-150613
Document
Author
Full name
Valdirene de Olivieira Scapin
E-mail
Institute/School/College
Knowledge Area
Date of Defense
Published
São Paulo, 2004
Supervisor
Committee
Lima, Nelson Batista de (President)
Sato, Ivone Mulako
Tabacniks, Manfredo Harri
Title in Portuguese
"Aplicação da fluorescência de raios X (WDXRF): Determinação da espessura e composição química de filmes finos"
Keywords in Portuguese
Composição Química
Difração de raios X
Espessura
Filmes Finos
Fluorescência de raios X
WDXRF
Abstract in Portuguese
Neste trabalho é descrito um procedimento para a determinação quantitativa da espessura e composição química de filmes finos, por fluorescência de raios X por dispersão de comprimento de onda (WDXRFS), utilizando-se o método de Parâmetros Fundamentais (FP). Este método foi validado dentro dos padrões de garantia de qualidade e aplicado as amostras de Al, Cr, TiO2, Ni, ZrO2 (monocamada) e Ni/Cr (duplacamada) sobre vidro; Ni sobre aço inoxidável e zinco metálico e TiO2 sobre ferro metálico (monocamada), as quais foram preparadas por deposição física de vapor (PVD). Os resultados das espessuras foram comparados com os métodos de Absorção (FRX-A) e Retroespalhamento de Rutherford (RBS), demonstrando a eficiência do método de parâmetros fundamentais. As características estruturais das amostras foram analisadas por difração de raios X (DRX) e mostraram que os mesmos não influenciam nas determinações das espessuras.
Title in English
APPLICATION OF X RAY FLUORESCENCE (WDXRF): THICKNESS AND CHEMICAL COMPOSITION DETERMINATION OF THIN FILMS
Keywords in English
Chemical Composition
Thickness
WDXRF
X ray diffraction
X ray fluorescence
Abstract in English
In this work a procedure is described for thickness and quantitative chemical composition of thin films by wavelength dispersion X-ray fluorescence (WDXRF) using Fundamental Parameters method. This method was validated according to quality assurance standard and applied sample Al, Cr, TiO2, Ni, ZrO2 (single thickness) and Ni/Cr (double thickness) on glass; Ni on steel and metallic zinc and TiO2 on metallic iron (single thickness), all the sample were prepared for physical deposition of vapor (PVD). The thickness had been compared with Absorption (FRX-A) and Rutherford Backscattering Spectrometry (RBS) methods; the result showed good efficiency of the fundamental parameters method. Sample structural characteristics analyzed by X ray diffraction (XRD) showed any influence in the thickness determinations.
 
WARNING - Viewing this document is conditioned on your acceptance of the following terms of use:
This document is only for private use for research and teaching activities. Reproduction for commercial use is forbidden. This rights cover the whole data about this document as well as its contents. Any uses or copies of this document in whole or in part must include the author's name.
ValdireneScapin.pdf (1.23 Mbytes)
Publishing Date
2007-09-04
 
WARNING: Learn what derived works are clicking here.
All rights of the thesis/dissertation are from the authors
CeTI-SC/STI
Digital Library of Theses and Dissertations of USP. Copyright © 2001-2024. All rights reserved.