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Master's Dissertation
DOI
10.11606/D.54.1994.tde-06102008-114423
Document
Author
Full name
Haroldo Arakaki
Institute/School/College
Knowledge Area
Date of Defense
Published
São Carlos, 1994
Supervisor
Committee
Roda, Valentin Obac (President)
Gonzaga, Adilson
Moreira, Edson dos Santos
Title in Portuguese
Instrumentação eletrônica de apoio para um sistema de epitaxia por feixes moleculares
Keywords in Portuguese
Aquisição de dados
Controle de temperatura
Conversor AD
Conversor DA
Epitaxia por feixes moleculares
Interface para PC
Motor de passo
Z80
Abstract in Portuguese
Neste trabalho é apresentado o desenvolvimento de instrumentação eletrônica para controle e automação de um sistema de crescimento de semicondutores por Epitaxia por Feixes Moleculares. Envolve uma variedade de circuitos analógicos e digitais como: um módulo de aquisição de dados e controle baseado em uma UCP Z-80, contendo algumas interfaces digitais e analógicas multiplexadas, e comunicando-se com um microcomputador através de uma interface serial. Envolve ainda o desenvolvimento de controladores de temperatura analógicos tipo P.I.D., atuação por motores de passo e circuitos de condicionamento de sinal.
Title in English
Electronic hardware development for molecular beam epitaxy.
Keywords in English
Analog to digital conversion
Data acquisition
Digital to analog conversion
Molecular beam epitaxy
PC interface
Step motor
Temperature control
Z80
Abstract in English
In this work is presented the development of electronic instrumentation for automation and control of a Molecular Beam Epitaxy semiconductor growth system. A variety of analog and digital instrumentation circuits have been designed and implemented, including a data acquisition and control system based on a Z-80 CPU, which controls some multiplexed digital and analog interfaces and talks to a microcomputer using serial communication. Other circuits have been also developed, including analog temperature controllers, stepper motor actuators and circuits for signal conditioning.
 
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HaroldoArakakiM.pdf (5.57 Mbytes)
Publishing Date
2010-02-23
 
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