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Doctoral Thesis
DOI
https://doi.org/10.11606/T.43.2006.tde-09042008-142058
Document
Author
Full name
Alessandro Alves da Silva
E-mail
Institute/School/College
Knowledge Area
Date of Defense
Published
São Paulo, 2006
Supervisor
Committee
Tabacniks, Manfredo Harri (President)
Cescato, Lucila Helena Deliesposte
Fichtner, Paulo Fernando Papaleo
Ribas, Roberto Vicencotto
Santos Filho, Sebastiao Gomes dos
Title in Portuguese
Efeitos topográficos em espectros RBS
Keywords in Portuguese
Física experimental
RBS
Retroespalhamento
Rugosidade superficial
Simulação
Sombreamento
Abstract in Portuguese
A medida da rugosidade de uma superfície costuma produzir resultados que dependem da metodologia empregada. A microscopia eletrônica de varredura, SEM, a microscopia de força atômica, AFM e a perfilometria são algumas das técnicas costumeiramente empregadas na caracterização de superfícies rugosas. Esse trabalho explora a e desenvolve o uso da espectrometria de retroespalhamento Rutherford, RBS, para medir e quantificar a rugosidade de uma superfície. Quatro diferentes amostras com rugosidade periódica e controlada (duas retangulares e duas senoidais) com razão de aspecto suficientemente grande que produzam efeitos mensuráveis por RBS, foram produzidas por interferometria óptica. Os espectros RBS experimentais foram convertidos em rugosidade rms e comparados com resultados de SEM e AFM. Medir rugosidade através de RBS permite inspecionar uma área (da ordem de alguns mm2) e profundidades muito maiores que as acessíveis por AFM, apesar de ainda limitados pela resolução em energia intrínseca da metodologia RBS.
Title in English
Topographic effects in RBS spectra
Keywords in English
Backscattering
Experimental physics
RBS
Roughness
Shadowing
Simulation
Abstract in English
Measuring the roughness of a surface use to produce results which depend on the employed methodology. Scanning Electronic Microscopy, Atomic Force Microscopy, profilometry, are some of the techniques used to characterize surface roughness. This work explores and develops the use of Rutherford Backscattering Spectrometry to measure and quantify the roughness of a surface. Four different samples with controlled and periodic surface profiles (two rectangular waved, and two sinusoidal), with enough aspect ratio to, give measurable effects in an RBS analysis, were produced by optical interferometry to test and verify the proposed methodology. The experimental RBS spectra were converted into rms roughness and compared to SEM and AFM measurements. Measuring roughness by RBS enables one to inspect a much bigger area (of the order of some mm2) and with more depth resolution, than by using an AFM, yet still limited by the experimental intrinsic energy resolution of the RBS methodology.
 
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tese_completa.pdf (33.19 Mbytes)
Publishing Date
2008-04-14
 
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