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Doctoral Thesis
DOI
https://doi.org/10.11606/T.3.2017.tde-18012017-150102
Document
Author
Full name
Diego Edison Lopez Silva
E-mail
Institute/School/College
Knowledge Area
Date of Defense
Published
São Paulo, 2016
Supervisor
Committee
Pereyra, Inês (President)
Fernandes, Elizabeth Grillo
López, Johnny Vilcarromero
Mansano, Ronaldo Domingues
Santos, Antonio Domingues dos
Title in Portuguese
Síntese e caracterização de nanotubos de carbono mediante as técnicas de CVD e PECVD.
Keywords in Portuguese
Catálise
CVD
Nanoparticulas
Nanotecnologia
Nanotubos de carbono
PECVD
Plasma (Microeletrônica)
Abstract in Portuguese
Por duas décadas, as nanoestruturas conhecidas como nanotubos de carbono (CNT), tem chamado a atenção de muitos centros de pesquisa, devido a suas propriedades físicas e químicas, que tornam este material uma ferramenta de primeira ordem em diferentes aplicações. Este trabalho pretende pesquisar a fabricação e caracterização destas estruturas, utilizando as técnicas de deposição química a vapor (CVD), e deposição química a vapor assistida por plasma (PECVD), visto que são as que reportam melhores resultados em termos de qualidade e quantidade, além de facilidade. A pesquisa está encaminhada pelo ajuste fino das variáveis que intervém nestes dois tipos de processo, tais como a temperatura, os gases precursores a usar, seus fluxos, e relação entre eles, o tipo de catalizador etc. assim como das variáveis que só fazem parte de cada processo diferenciado, no caso do CVD as altas temperaturas, e no caso do PECVD a pressão, a potência de RF aplicada para a formação do plasma etc. A forma de avaliar os resultados obtidos foi mediante as técnicas mais idôneas relativas aos nanotubos de carbono, as quais são a microscopia Raman, a microscopia eletrônica tanto de varredura como de transmissão, e a dispersão de raios X. Desta forma pretende-se fazer um trabalho exaustivo com a finalidade de conseguir uma síntese idônea das nanoestruturas de carbono para diferentes tipos de aplicações encaminhadas principalmente a dispositivos elétricos.
Title in English
Synthesis and characterization of carbon nanotubes by CVD and PECVD techniques.
Keywords in English
Carbon nanotubes
Catalysis
CVD
Nanoparticles
PECVD
Abstract in English
For the past two decades, the nanostructures known as carbon nanotubes (CNT), have been the center of attention of many research centers, due mainly to its physical and chemical properties, turning them into a first order tool in many kind of applications. This work pretends to study the fabrication and characterization of these nanostructures, using the chemical vapor deposition (CVD), and the plasma enhanced chemical vapor deposition (PECVD) techniques, since they are reported as the best ones in terms of quality, quantity and ease of use. The research is routed by the fine tuning of the variables involved in both processes, such as the temperature, the gas precursors, the gas flows, the flow ratio, the metal catalyst etc. as well as the variables involved in just one of the processes, in the case of CVD, the high temperatures, and in the case of PECVD, the pressure, the RF power for plasma formation etc. The way to evaluate the obtained results was through the most suitable techniques relative to CNT analysis , as Raman microscopy, electron microscopy, both scanning and transmission, and x-ray diffraction. Thus we pretend to perform an exhaustive research with the aim to find a synthesis of carbon nanostructures suitable for different kind of applications, routed principally to electronic devices.
 
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Publishing Date
2017-01-24
 
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