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Master's Dissertation
DOI
https://doi.org/10.11606/D.3.2009.tde-08092010-121153
Document
Author
Full name
Alex Fukunaga Gomes
E-mail
Institute/School/College
Knowledge Area
Date of Defense
Published
São Paulo, 2009
Supervisor
Committee
Charry Rodriguez, Edgar (President)
Reina Muñoz, Rodrigo
Santos Filho, Sebastião Gomes dos
Title in Portuguese
Calibração e compensação de sensores de pressão piezorresistivos.
Keywords in Portuguese
Dispositivos eletrônicos
Microeletrônica
Sensor
Abstract in Portuguese
Este trabalho apresenta a compensação e calibração de sensores de pressão piezoresistivos com a utilização de resistores de alta precisão. Para que tal objetivo fosse cumprido, foi necessária a caracterização do sensor com relação aos parâmetros térmicos e elétricos. Além disso, foi definida uma metodologia com a qual se obteve os tempos necessários para aquisição dos dados com relação ao valor de precisão requisitada. Os resultados mostram que os valores dos resistores são dependentes da alimentação fornecida ao sensor e que a variação da tensão de saída, com relação a uma média, tem caráter parabólico. A curva do tempo de estabilização para aquisição de dados tem formato assintótico. Com a compensação e calibração tivemos uma diminuição na tensão de offset de cerca de 97% e compensação térmica com cerca de 70% para a tensão de fundo de escala, porém com isso foi reduzido 8% no valor da sensibilidade.
Title in English
Calibration and compensation of piezoresistive pressure sensors.
Keywords in English
Electronic devices
Microeletronics
Sensor
Abstract in English
This work presents the compensation and calibration of piezoresistive pressure sensors with the use of precision resistors. For this objective to be met was necessary to characterize the sensor with respect to thermal and electrical parameters. Also it was defined a methodology with which they obtained the time required for data acquisition based on the value of precision required. The results show that the values of resistors are dependent on power supplied to the sensor and the variation of the output voltage with respect to an average has a parabolic feature. The curve of the settling time for data acquisition format is asymptotic. With the compensation and calibration, a decrease in the offset voltage of about 97% was observed and temperature was compensated with 70% for full scale, however, the sensitivity was reduced in 8%.
 
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Publishing Date
2010-09-28
 
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