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Master's Dissertation
DOI
10.11606/D.3.2008.tde-01102008-142910
Document
Author
Full name
Robson Scaff
E-mail
Institute/School/College
Knowledge Area
Date of Defense
Published
São Paulo, 2008
Supervisor
Committee
Santos Filho, Sebastião Gomes dos (President)
Angnes, Lúcio
Góngora Rubio, Mário Ricardo
Title in Portuguese
Caracterização elétrica de dispositivos tipo ISFET com estrutura Si/SiO2/Si3N4 para medição de pH utilizando pseudoeletrodos de Pt, Ag e Au.
Keywords in Portuguese
Circuitos integrados MOS
Eletroquímica
Microeletrônica
Abstract in Portuguese
Neste trabalho, foi realizado um estudo da caracterização elétrica dos ISFETs com estrutura Si/SiO2/Si3N4, utilizando pseudoeletrodos de Pt, Ag e Au como alternativas aos eletrodos convencionais para medições de pH. Primeiramente, foram empregados três métodos reportados na literatura (extrapolação linear para obtenção da tensão de limiar, segunda derivada para obtenção da tensão de limiar e corrente de sublimiar, respectivamente) com o objetivo de obter a sensibilidade dos ISFETs (mV/pH) e analisar a confiabilidade dos resultados utilizando eletrodo de referência padrão de Ag/AgCl. Posteriormente, tendo como base o eletrodo de Ag/AgCl, foram estudados os desempenhos de pseudoeletrodos de Pt, Ag e Au nas medidas de pH. Como resultado, observou-se que os pseudoeletrodos de Pt e Ag apresentaram sensibilidades compatíveis com o eletrodo de referência padrão de Ag/AgCl (~50mV/pH) para pH ácido na faixa de 1 a 3. Já o pseudoeletrodo de Au, manteve um comportamento aproximadamente linear ao longo de toda a faixa de pH estudada (1 a 10), porém, com sensibilidade inferior na faixa de 32 à 34mV/pH.
Title in English
Electrical characterization of ISFET devices with Si/SiO2/Si3N4 structure to measure pH using Pt, Ag, and Au pseudoelectrodes.
Keywords in English
ISFET
pH
Pseudoelectrode
Si3N4
Threshold voltage
Abstract in English
In this work, it is presented a study of the electrical characterization of Si/SiO2/Si3N4 estructured ISFETs using Pt, Ag and Au pseudoelectrodes as alternative references to the conventional ones for pH measurements. At first, it was used three different methods (linear extrapolation method to obtain the threshold voltage, second derivative method to obtain the threshold voltage and subthreshold-current method, respectively) having as objective to obtain the sensitivity of the ISFETs (mV/pH) and to analyze the reliability of the results using the standard Ag/AgCl reference electrode. Subsequently, using the Ag/AgCl electrode as a base for comparation, it was studied the performance of Pt, Ag and Au pseudoelectrodes for pH measurement. As a result, it was observed that the Pt and Ag electrodes presented sensitivity similar to the standard Ag/AgCl reference electrode (~50mV/pH) for pH in the range of 1 to 3. On the other hand, the Au pseudoelectrode presented an approximately linear behavior in all studied range of the pH (1 to 10), but, with lower sensitivity varying in the range of 32 to 34mV/pH.
 
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Publishing Date
2008-10-08
 
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