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Master's Dissertation
DOI
10.11606/D.3.2002.tde-12072002-131428
Document
Author
Full name
Marcelo Silva Guimarães
E-mail
Institute/School/College
Knowledge Area
Date of Defense
Published
São Paulo, 2002
Supervisor
Committee
Sinatora, Amilton (President)
Carreno, Marcelo Nelson Paez
Ferreira, Luiz Otávio Saraiva
Title in Portuguese
Proposta de método para caracterização de propriedades termomecânicas de filmes finos utilizando dispositivos MEMS.
Keywords in Portuguese
filmes finos
flambagem
MEMS
microscopia nomarski
microssistemas
propriedades mecânicas propriedades térmicas
Abstract in Portuguese
Um fator importante para o desenvolvimento de projetos de microssistemas é o conhecimento de propriedades termomecânicas dos materiais e a compreensão dos mecanismos de falhas. Este trabalho estuda o comportamento mecânico de microvigas atuadas termicamente e propõem um método para ser utilizado na caracterização de propriedades termomecânicas de filmes finos. Fabricou-se vigas de Oxinitreto de Silício em que se aplicou a microscopia Nomarski para observar a deformação e a ocorrência do fenômeno de flambagem.
Title in English
Proposition of thin films thermomechanical characterization using MEMS devices.
Keywords in English
buckling
mechanical properties
microelectromechanical systems
nomarski microscopy
thermophysical properties
thin films
Abstract in English
An important factor to develop microsystems is knowledge of materials properties and failure mechanisms. This research studies the thermal actuated microbeam mechanical behavior and propose a method in order to characterize thermomechanical properties of thin films. Silicon Oxynitride microbeams are fabricated and Nomarski microscopy was applied to observe strain and buckling phenomenon ocurrence.
 
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Publishing Date
2002-12-10
 
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